Microscope Interfaces

SPECIAL INTERFACES FOR MICROSCOPE STAGES

Our experience in wafer handling and in special applications allow us to design custom interfaces for any kind of  microsocpe stage.

Such interfaces are itended to fit into the standard microscope stages and to fulfill special needs related to wafer handling.

In particular we have done interfaces for Leica and Zeiss microscopes, as well as for Merzhauser XY stages, to interface such units with loaders or simply to allow the inspection of wafer with special features, such as wafer with holes for MEMS applications or extermely thin, flexible wafers.

LEICA INM 20 Special microscope interface for extremely thin 6" and 8" wafers