Microscope loaders, inspection systems
also including macro and
back inspection,
with laser mapping and computer control, integrating
SPC software, especially suitable for thin wafers;
Microscope integrated Autoloaders;
Wafer Macro inspection systems;
Inspection systems for wafers and chips, with programmable
patterns, computer aided defect collection and SPC;
Frame UV irradiation machines for dicing process;
Wafer UV irradiation machines;
UV/Ozone cleaning systems for surface
curing;
|