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Thermocouple instrumented wafers are the best tool to control process parameters in all the cases where temperature distribution is critical. Mounting probes directly into a wafer makes the measurement response as close as possible to the final process, and makes possible a complete setup of all the thermal parameters. Our thermocouple equipped wafers have been studied for machine calibration, process testing and control. Many versions available, from low to high temperature, from 4 to 12" and with different kinds of thermocouples, layout and connector type. Wafers are manufactured under customer specifications, to fulfill any process profiling need. Contact us for further information.
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Thermocouple instrumented wafers 
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