CARBON FIBER END EFFECTOR DATA SHEET

OUR CODE _______________________________________________________ORIGINAL PART

C30-SZVT301-1V_________________________________________________________ NOT AVAILABLE

RELEASE DATE Dec. 2004__________________________________________RELEASE NUMBER 1.0

EQUIPMENT MANUFACTURER_____________________________________ EQUIPMENT TYPE

SEZ __________________________________________________________________ CMP

APPLICATION DESCRIPTION

This is a straight shaped, carbon end effector. It is made by two layers of 1.5 mm carbon laminate, and replaces a ceramic original part.

Basically our part is more durable than the fragile original. This version is intended to be used with the heavy 300 mm wafers, and the double thickness design is intended to improve stiffness for these applications. The teflon vacuum pad is also better to avoid scratches on wafer surface.

PICTURE