CARBON FIBER END EFFECTOR DATA SHEET
CARBON
FIBER END EFFECTOR DATA SHEET
OUR CODE _______________________________________________________ORIGINAL PART
C30-OKGN1-2V _________________________________________________________ NOT AVAILABLE
RELEASE DATE Oct. 2003__________________________________________RELEASE NUMBER 1.0
EQUIPMENT MANUFACTURER_____________________________________ EQUIPMENT TYPE
OKAMOTO _________________________________________________________________ GRINDER
APPLICATION DESCRIPTION
This is a pad shaped, carbon end effector. It is made by two layer of 1.5 mm carbon laminate, and replaces a ceramic original part.
Basically our part is more durable than the fragile original (especially in the holder area). The micro holes vacuum distribution is made to assure better grip especially on thin wafers and to optimize the handling. Carbon fiber contact is also better than ceramic to avoid possible scratches on wafer surface.
PICTURE
