CARBON
FIBER END EFFECTOR DATA SHEET
OUR CODE _______________________________________________________ORIGINAL PART
C30-NKLQA1-1V _________________________________________________________ 4B006-106-AN
RELEASE DATE June 2004__________________________________________RELEASE NUMBER 1.2
EQUIPMENT MANUFACTURER_____________________________________ EQUIPMENT TYPE
NIKON _________________________________________________________________MICROSCOPE LOADER
APPLICATION DESCRIPTION
This is a question mark shaped, carbon end effector. It is made by a double layer of 1.5 mm carbon laminate, and replaces a ceramic original part.
Basically our part is more durable than the fragile original. The teflon vacuum pad is made to assure better grip on the wafer and to optimize the handling. Teflon contact is also better to avoid possible scratches on wafer surface.
ATTENTION: THE SHAPE OF THIS PART MAKES IT A LITTLE WEAK. IT IS SUITABLE FOR USE WITH NORMAL WAFERS AND NOT WITH HEAVY SETS. CONTACT US TO TEST IT BEFORE ORDERING
PICTURE