CARBON FIBER END EFFECTOR DATA SHEET

OUR CODE _______________________________________________________ORIGINAL PART P/N

C30-AXAS200-1V _______________________________________________________NOT AVAILABLE

RELEASE DATE July, 2004 __________________________________________RELEASE NUMBER 1.0

EQUIPMENT MANUFACTURER ______________________________________EQUIPMENT TYPE

AXCELIS _____________________________________________________________ASHER

APPLICATION DESCRIPTION

The EE is used to put/extract wafers in/from an high temperature chamber. The EE is featured with an holder (steel with nickel plating) and two blades in fork shape. Each fork has a stainless steel lamination on the lower side and a kapton cover on the upper side (the picture is done on a both side laminated part). Temperature into the chamber should be around 250 °C, and cycle time should be of some seconds.

PICTURE

LINK TO PRODUCTION DOCUMENTATION