CARBON FIBER END EFFECTOR DATA SHEET

OUR CODE _______________________________________________________ORIGINAL PART P/N

C26-EB201-1V _____________________________________________________NOT AVAILABLE

RELEASE DATE Dec. 2004 __________________________________________RELEASE NUMBER 1.0

EQUIPMENT MANUFACTURER_____________________________________ EQUIPMENT TYPE

EBARA ____________________________________________________________NOT AVAILABLE

APPLICATION DESCRIPTION

This is a fork shaped, 8", full carbon end effector. It is made by two layers of 1.3 mm carbon laminate, and replaces a ceramic original part.

Our application is more durable than the fragile ceramic original, and due to the teflon pads gives less scratches to wafer surface.

PICTURE