CARBON FIBER END EFFECTOR DATA SHEET

OUR CODE _______________________________________________________ORIGINAL PART P/N

C25-AXGSCS1-0M _____________________________________________________NOT AVAILABLE

RELEASE DATE July, 2003 __________________________________________RELEASE NUMBER 1.0

EQUIPMENT MANUFACTURER_____________________________________ EQUIPMENT TYPE

AXCELIS ___________________________________________________________GSD IMPLANTER

APPLICATION DESCRIPTION

This is not really an end effector. It is a pad, located into a cassette (13 pcs each), acting as wafer holder.

Pad is equipped with screw pins with silicone rubber to hold wafers. The advantage in using carbon fiber is not in price, but in the fact that carbon is stable and can't be bent or damaged. More, the shape of our part is different from the original, to allow the replacement of holder pins in a easier way.

PICTURE

LINK TO PRODUCTION DOCUMENTATION