CARBON FIBER END EFFECTOR DATA SHEET

OUR CODE _______________________________________________________ORIGINAL PART

C15-TL501-1V_________________________________________________________ NOT AVAILABLE

RELEASE DATE May. 2003__________________________________________RELEASE NUMBER 1.0

EQUIPMENT MANUFACTURER_____________________________________ EQUIPMENT TYPE

TEL _________________________________________________________________ TEL MK5

APPLICATION DESCRIPTION

This is a straight shaped, carbon end effector. It is made by a single layer of 1.5 mm carbon laminate, and replaces an original made by ceramic. Our part is more durable than the fragile original. Teflon pad is designed for optimal wafer grip, and reduces the possibility of scratches on wafer surface.

PICTURE