CARBON FIBER END EFFECTOR DATA SHEET

OUR CODE _______________________________________________________ORIGINAL PART

C15-SZFR1UT-1V _________________________________________________________ NOT AVAILABLE

RELEASE DATE May. 2004__________________________________________RELEASE NUMBER 1.0

EQUIPMENT MANUFACTURER_____________________________________ EQUIPMENT TYPE

SEZ __________________________________________________________________ CMP

APPLICATION DESCRIPTION

This is a half fork shaped, carbon end effector. It is made by a single layer of 1.5 mm carbon laminate, and replaces a metal original part with teflon vacuum pads.

Basically our part is more durable than the bendable original. The thickness of the part is lower than the original and this is better in terms of handling. This version is equipped with the micro holes vacuum distribution, which is optimal or the handling of thin wafers.

PICTURE