CARBON FIBER END EFFECTOR DATA SHEET

OUR CODE _______________________________________________________ORIGINAL PART

C15-SZFL201-2V_________________________________________________________ NOT AVAILABLE

RELEASE DATE Dec. 2004__________________________________________RELEASE NUMBER 1.0

EQUIPMENT MANUFACTURER_____________________________________ EQUIPMENT TYPE

SEZ __________________________________________________________________ CMP

APPLICATION DESCRIPTION

This is a straight shaped, double side flip type carbon end effector. It is made by a single layer of 1.5 mm carbon laminate, and replaces a ceramic original part.

Basically our part is more durable than the fragile original. The teflon vacuum pad is also better to avoid scratches on wafer surface.

PICTURE