CARBON FIBER END EFFECTOR DATA SHEET

OUR CODE _______________________________________________________ORIGINAL PART

C15-SV90S5-1V_________________________________________________________ NOT AVAILABLE

RELEASE DATE May. 2000__________________________________________RELEASE NUMBER 1.2

EQUIPMENT MANUFACTURER_____________________________________ EQUIPMENT TYPE

SVG__________________________________________________________________ SVG 90 TRACK

APPLICATION DESCRIPTION

This is a straight shaped, carbon end effector. It is made by a single layer of 1.5 mm carbon laminate, plus a double layer reinforcement in the mounting section, and replaces a teflon covered, fiberglass original part.

Basically our part is more durable than the fragile original. The teflon vacuum pad is also better to assure grip on the wafer, and is more durable than the surface treatment of the original. With this part we reached a durability which is more than 20 times the original (results from customer tests).

PICTURE