CARBON FIBER END EFFECTOR DATA SHEET

OUR CODE _______________________________________________________ORIGINAL PART P/N

C15-PL2-1V _________________________________________________________ 420210-001 Rev.B

RELEASE DATE May. 2003__________________________________________RELEASE NUMBER 1.0

EQUIPMENT MANUFACTURER_____________________________________ EQUIPMENT TYPE

FSI _______________________________________________________________POLARIS

APPLICATION DESCRIPTION

This is a fork shaped, 6" and 8" carbon end effector with a long aluminum holder. It is made by a single layer of 1.5 mm carbon laminate, and replaces a metal original part.

The double material construction allow to apply the carbon technology on the final blade, which was originally made by a soft steel blade with peek suction cups,

Basically our part is more durable than the bendable original, and the shape of the teflon vacuum pads gives more retainment force on the wafer.

PICTURE