CARBON FIBER END EFFECTOR DATA SHEET

OUR CODE _______________________________________________________ORIGINAL PART P/N

C15-PL1-3V _________________________________________________________ 919186-150 PCI-1150

RELEASE DATE Jan. 2004 __________________________________________RELEASE NUMBER 1.4

EQUIPMENT MANUFACTURER_____________________________________ EQUIPMENT TYPE

FSI _______________________________________________________________POLARIS

APPLICATION DESCRIPTION

This is a fork shaped, 6" and 8" full carbon end effector. It is made by a single layer of 1.5 mm carbon laminate, and replaces a carbon original part.

There are some differences between the original par and ours. The original is much more stiff but fragile, and the vacuum pads are rigid suction pads made by peek.

Basically our part is more durable than the original, and the shape of the teflon vacuum pads gives more retainment force on the wafer.

PICTURE