CARBON FIBER END EFFECTOR DATA SHEET
CARBON
FIBER END EFFECTOR DATA SHEET
OUR CODE _______________________________________________________ORIGINAL PART
C15-NKS2-1V _________________________________________________________ NOT AVAILABLE
RELEASE DATE Oct. 2004__________________________________________RELEASE NUMBER 1.0
EQUIPMENT MANUFACTURER_____________________________________ EQUIPMENT TYPE
NIKON _________________________________________________________________ STEPPER
APPLICATION DESCRIPTION
This is a rectangualr shaped, carbon end effector. It is made by a single layer of 1.5 mm carbon laminate, and replaces a ceramic original part.
Basically our part is more durable than the fragile original. The teflon vacuum pad is made to assure better grip on the wafer and to optimize the handling. Teflon contact is also better to avoid possible scratches on wafer surface.
PICTURE
