CARBON FIBER END EFFECTOR DATA SHEET

OUR CODE _______________________________________________________ORIGINAL PART

C15-NKS1L-1V _________________________________________________________ 4B001-383-AN

RELEASE DATE Oct. 2004__________________________________________RELEASE NUMBER 1.0

EQUIPMENT MANUFACTURER_____________________________________ EQUIPMENT TYPE

NIKON _________________________________________________________________ STEPPER

APPLICATION DESCRIPTION

This is a rectangualr shaped, carbon end effector. It is made by a single layer of 1.5 mm carbon laminate, and replaces a ceramic original part.

Basically our part is more durable than the fragile original. The teflon vacuum pad is made to assure better grip on the wafer and to optimize the handling. Teflon contact is also better to avoid possible scratches on wafer surface.

PICTURE