CARBON FIBER END EFFECTOR DATA SHEET
CARBON
FIBER END EFFECTOR DATA SHEET
OUR CODE _______________________________________________________ORIGINAL PART
C15-NKLMF1-1V _________________________________________________________ 4B019-048-AN
RELEASE DATE June 2004__________________________________________RELEASE NUMBER 1.0
EQUIPMENT MANUFACTURER_____________________________________ EQUIPMENT TYPE
NIKON _________________________________________________________________MICROSCOPE LOADER
APPLICATION DESCRIPTION
This is a couple of finger shaped, carbon end effectors. It is made by a single layer of 1.5 mm carbon laminate, and replaces a ceramic original part.
Basically our part is more durable than the fragile original. The teflon vacuum pad is made to assure better grip on the wafer and to optimize the handling. Teflon contact is also better to avoid possible scratches on wafer surface.
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