CARBON FIBER END EFFECTOR DATA SHEET

OUR CODE _______________________________________________________ORIGINAL PART

C15-MWDA-1V _________________________________________________________ NOT AVAILABLE

RELEASE DATE May 2002__________________________________________RELEASE NUMBER 1.1

EQUIPMENT MANUFACTURER_____________________________________ EQUIPMENT TYPE

MICROCONTROL ELECTRONIC___________________________________________MWD MICROSCOPE LOADER

APPLICATION DESCRIPTION

This is a "L" shaped, carbon end effector. It is made by a single layer of 1.5 mm carbon laminate, and replaces a soft metal original part with a milling for the vacuum.

Basically our part is more durable than the bendable original, and the shape of vacuum pads gives better retainment of the wafer. The teflon pads are also better for wafer contact, avoiding the scratches which can occur in case of direct contact with a metal surface.

PICTURE