CARBON FIBER END EFFECTOR DATA SHEET

OUR CODE _______________________________________________________ORIGINAL PART

C15-MTI-1V _________________________________________________________ NOT AVAILABLE


RELEASE DATE June 2000__________________________________________RELEASE NUMBER 1.0


EQUIPMENT MANUFACTURER_____________________________________ EQUIPMENT TYPE

MTI ___________________________________________________________________SCRUBBER


APPLICATION DESCRIPTION


This is a fork shaped, carbon end effector. It is made by a single layer of 1.5 mm carbon laminate, and replaces a metal original part.

Basically our part is more durable than the bendable original. The teflon vacuum pad is made to assure better grip on the wafer and to optimize the handling, also in case of small misalignment of the two fingers which are wide enough. The picture is about the 1.0 version, while the 1.1 has a single central pad with a wide slot.


PICTURE