CARBON FIBER END EFFECTOR DATA SHEET

OUR CODE _______________________________________________________ORIGINAL PART

C15-MCEP4/8-1V _________________________________________________________ NOT AVAILABLE

RELEASE DATE June 2000__________________________________________RELEASE NUMBER 1.1

EQUIPMENT MANUFACTURER_____________________________________ EQUIPMENT TYPE

MICROCONTROL ELECTRONIC__________________________________________PFM/PFP TAPE MOUNTER/PEELER

APPLICATION DESCRIPTION

This is a hook shaped, carbon end effector. For UV applications (WAFER PEELER) it is protected by an upper side cover made by a stainless steel plate and the lower side protected with a sheet of adhesive aluminum . It is made by a single layer of 1.5 mm carbon laminate, and replaces a metal original part.

Basically our part is more durable than the bendable original, and it is possible to have a version with micro holes suitable for thin wafer applications.

In case the teflon pad solution for vacuum is applied, there are less possibilities to have scratches on wafer surface, while for the UV irradiation, which can damage plastic parts, the micro holes technique is recommended.

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