CARBON FIBER END EFFECTOR DATA SHEET

OUR CODE _______________________________________________________ORIGINAL PART

C15-KL642-1V _________________________________________________________ NOT AVAILABLE

RELEASE DATE Nov. 2003__________________________________________RELEASE NUMBER 1.0

EQUIPMENT MANUFACTURER_____________________________________ EQUIPMENT TYPE

KLA_______________________________________________________________6420

APPLICATION DESCRIPTION

This is a straight shaped, carbon end effector larger than the normal. It is made by a single layer of 1.5 mm carbon laminate, and replaces a ceramic original part.

Basically our part is more durable than the fragile original, and the teflon pad contact give less scratches to wafer surface. Our part is also thinner than the original, and this is an advantage during handling.

ATTENTION: THE ORIGINAL PART IS EQUIPPED WITH TWO GLASS SECTIONS AT THE TWO SIDES INTO THE MIDDLE PART OF THE PIECE. PLEASE VERIFY WITH THE CUSTOMERS IF THEY USE THIS FEATURE BEFORE SELLING. IT IS ALSO POSSIBLE TO SUPPLY PARTS WITHOUT MATERIAL INTO THE GLASS SECTIONS, BUT THE THICKNESS INCREASES

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