CARBON FIBER END EFFECTOR DATA SHEET

OUR CODE _______________________________________________________ORIGINAL PART P/N

C15-EV150-1V _____________________________________________________NOT AVAILABLE

RELEASE DATE Dec. 2004 __________________________________________RELEASE NUMBER 1.0

EQUIPMENT MANUFACTURER_____________________________________ EQUIPMENT TYPE

EVG _______________________________________________________________EVG 150 TRACK

APPLICATION DESCRIPTION

This is a fork shaped, 8" full carbon end effector. It is made by a single layer of 1.5 mm carbon laminate, and replaces a metal original part. Our application is more durable than the bendable metal original, and due to the teflon pads gives less scratches to wafer surface.

This model is also available in high temperature version, with Kapton pads, tested for wafer temperatures up to 350°C.

PICTURE