CARBON FIBER END EFFECTOR DATA SHEET

OUR CODE _______________________________________________________ORIGINAL PART P/N

C15-CNI5-1V_________________________________________________________ BF6-3046-020

RELEASE DATE June, 2002_________________________________________ RELEASE NUMBER 1.2

EQUIPMENT MANUFACTURER_____________________________________ EQUIPMENT TYPE

CANON_____________________________________________________________ I5 TRACK

APPLICATION DESCRIPTION

This is an 8" , fork shaped vacuum end effector, featured by a metal holder with M3 vacuum intake hole.

The main features of such application is given by the better durability vs. the original part , which is made by alumina ceramic, and then is fragile. The vacuum distribution is also different, allowing an higher retaining force on the wafer. The picture is of the 1.0 release, with a vacuum distribution similar to the original part, and the holder made by carbon fiber.

PICTURE

LINK TO PRODUCTION DOCUMENTATION