CARBON FIBER END EFFECTOR DATA SHEET

OUR CODE _______________________________________________________ORIGINAL PART

C15-AX108-1V_________________________________________________________ NOT AVAILABLE

RELEASE DATE May. 1999__________________________________________RELEASE NUMBER 1.0

EQUIPMENT MANUFACTURER_____________________________________ EQUIPMENT TYPE

ZEISS _________________________________________________________________ AXIOTRON LOADER 8”

APPLICATION DESCRIPTION

This is a fork shaped, carbon end effector for 8" applications. It is made by a single layer of 1.5 mm carbon laminate, and replaces an original made by steel. Our part is more durable than the bendable original, and teflon pad for vacuum give less risk of  scratches on wafer surface if compared to the original.

PICTURE