CARBON FIBER END EFFECTOR DATA SHEET

OUR CODE _______________________________________________________ORIGINAL PART

C15-AX106-1V_________________________________________________________ NOT AVAILABLE

RELEASE DATE May. 2000__________________________________________RELEASE NUMBER 1.0

EQUIPMENT MANUFACTURER_____________________________________ EQUIPMENT TYPE

ZEISS _________________________________________________________________ AXIOTRON LOADER 6”

APPLICATION DESCRIPTION

This is a fork shaped, carbon end effector for 6" applications. It is made by a single layer of 1.5 mm carbon laminate, and replaces an original made by steel. Our part is more durable than the bendable original, and customer tests proved that this part generate less scratches on wafer surface, compared to the original.

PICTURE