CARBON FIBER END EFFECTOR DATA SHEET

OUR CODE _______________________________________________________ORIGINAL PART

C13-NKLF1-1V _________________________________________________________ NOT AVAILABLE

RELEASE DATE June 2004__________________________________________RELEASE NUMBER 1.0

EQUIPMENT MANUFACTURER_____________________________________ EQUIPMENT TYPE

NIKON _________________________________________________________________MICROSCOPE LOADER

APPLICATION DESCRIPTION

This is a fork shaped, carbon end effector. It is made by a single layer of 1.3 mm carbon laminate, and replaces a ceramic original part.

Basically our part is more durable than the fragile original. The teflon vacuum pad is made to assure better grip on the wafer and to optimize the handling, also in case of small misalignment of the two fingers which are wide enough. Teflon contact is also better to avoid possible scratches on wafer surface.

PICTURE