CARBON FIBER END EFFECTOR DATA SHEET

OUR CODE _______________________________________________________ORIGINAL PART P/N

C13-EV001F-1V _______________________________________________________970-288-2746

RELEASE DATE June 2004 __________________________________________RELEASE NUMBER 1.1

EQUIPMENT MANUFACTURER_____________________________________ EQUIPMENT TYPE

EVG _______________________________________________________________EVG WAFER TESTER

APPLICATION DESCRIPTION

This is a fork shaped, 6"; full carbon end effector. It is made by a single layer of 1.3 mm carbon laminate, plus a second reinforcement layer in the holder section, and replaces a metal original part.

The reinforcement layer is intended to increase the stiffness of the part. This is not necessary for normal 6" applications, but in case of heavy wafers (e.g. double layered AsGa sets) it is needed to avoid vibrations.

Our application is more durable than the bendable metal original, and due to the teflon pads gives less scratches to wafer surface.

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