CARBON FIBER END EFFECTOR DATA SHEET

OUR CODE_______________________________________________________ORIGINAL PART P/N

C15-DN62-1V _______________________________________________________2-F3-38335

RELEASE DATE June 2004 ________________________________________RELEASE NUMBER 1.0

EQUIPMENT MANUFACTURER ___________________________________EQUIPMENT TYPE

DNS _____________________________________________________________DNS 60

APPLICATION DESCRIPTION

This is a 6" , straight type vacuum end effector.

Our part is featured by a better durability vs, the original. The original is made by ceramic, and then fragile. The contact area of our part is made by a teflon pad, and then gives less possibility to scratch wafer surface.

PICTURE