CARBON FIBER END EFFECTOR DATA SHEET

OUR CODE _______________________________________________________ORIGINAL PART P/N

C15-DN60SD1-1V _______________________________________________________2-F3-83246 / 47

RELEASE DATE June 2003 __________________________________________RELEASE NUMBER 1.1

EQUIPMENT MANUFACTURER _____________________________________EQUIPMENT TYPE

DNS ________________________________________________________________DNS 60 SSW

APPLICATION DESCRIPTION

This is a double, 6", straight type vacuum end effector.

Our part is featured by a better durability vs, the original. The original is made by ceramic, and then fragile. The contact area of our part is made by a teflon pad, and then gives less possibility to scratch wafer surface.

PICTURE