CARBON FIBER END EFFECTOR DATA SHEET

OUR CODE _______________________________________________________ORIGINAL PART P/N

C15-DN60A1-1V ____________________________________________________________2-F3-31399

RELEASE DATE Nov. 2003 __________________________________________RELEASE NUMBER 1.0

EQUIPMENT MANUFACTURER _____________________________________EQUIPMENT TYPE

DNS _________________________________________________________________DNS 60

APPLICATION DESCRIPTION

This is a 6" , straight shaped vacuum end effector.

Our part is featured by a better durability vs, the original. The original is made by ceramic, and then fragile. The contact between wafer and EE is done by a teflon pad, and then there are less possibility to do scratches on the wafer surface.

PICTURE